Gemini™ MxG5xx 大气压至超高真空真空计
产品简介
详细信息
好处
Long lifetime in harsh environments
在恶劣环境下，使用寿命长
- 低杂散磁场
- 零维护 - 可换插头
- 超紧凑尺寸
- 抗腐蚀馈入装置
- 可选测量电流
- 2 relay setpoints (in conjunction with MxG55x EtherCAT Version)
- EtherCAT and RS232/ RS485 digital interace
典型应用
- 基本压力监视和控制，在蒸发和溅射镀膜应用中从大气压到高真空。
- 一般真空测量 - 工业炉、建筑玻璃、半导体、冰箱和空调。
- 分析和研发应用 – 质谱分析、电子显微镜、医疗、眼科、光学和高能物理。
新闻
新一代冷阴极/冷阴极-皮拉尼组合真空计现在开放订购！
规格
| 类型 | MAG5xx | MPG5xx | |
|---|---|---|---|
| 测量系统 | Cold cathode ionization measurement system (according to the inverted magnetron principle) | Pirani and cold cathode ionization measurement system (according to the inverted magnetron principle) | |
| 测量范围（空气、氮气） | 1×10-9 … 1×10-2 | 1×10-9 … 1000 | |
| 准确度 (N2) | |||
| 1×10-8 … 1×10-2 毫巴 | % of reading | 30 | 30 |
| 1×10-2 … 100 毫巴 | % of reading | - | 30 |
| 100 … 1000 毫巴 | % of reading | - | 50 |
| 可重复性 (N2) | |||
| 1×10-8 … 1×10-2 毫巴 | % of reading | 5 | - |
| 1×10-8 … 100 毫巴 | % of reading | - | 5 |
| 安装定位 | any | any | |
| 容许压力 | bar (absolute) | 10 (limited to inert gases <> | 10 (limited to inert gases <> |
| 容许温度 | |||
| 运行（环境） | °C | +5 ... +55 | +5 ... +55 |
| 法兰烘烤 (1) | °C | <150 | <150 |
| 储存 | °C | -40 ... +70 | -40 ... +70 |
| 灯丝温度 | °C | - | 120 |
| 一年 30 天的相对湿度 | |||
| 1×10-7 … 1×10-2 毫巴 | % | <95 (non-condensing) | <95 (non-condensing) |
| 1×10-8 … 1×10-2 毫巴 | % | <70 (non-condensing) | <70 (non-condensing) |
| 供电电压 | |||
| 在量规 (2) | V (dc) | +14.5 ... +30 | +14.5 ... +30 |
| 波纹 | V (p-p) | <1 | <1 |
| 功耗 | W | <2 | <2 |
| 待连接的保险丝 | AT | <1 | <1 |
| 电压范围 | |||
| 模拟输出 | V | 0 ... +10.5 | 0 ... +10.5 |
| 测量范围 | |||
| 3MAx-xxx-xxxN | V | <+0.5 | |
| 3MBx-xxx-xxxP | V | - | |
| 3MAx-xxx-xxxQ | V | +0.667 ... +10 | |
| 电压比压力 | |||
| 3MAx-xxx-xxxN | volts per decade | 1 (logarithmic) | |
| 3MBx-xxx-xxxP | volts per decade | - | |
| 3MAx-xxx-xxxQ | volts per decade | 1.33 (logaritmic) | |
| 错误信号 | |||
| 3MAx-xxx-xxxN | V | <+0.5 | |
| 3MA-xxx-xxxQ | V | <+0.3 | |
| 3MBx-xxx-xxxP | V | - | |
| Output impedance | Ω | 2 x 4.7 (short circuit-proof) | |
| Load impedance | kΩ | >10 (short circuit-proof) | |
| 阶跃响应时间 | |||
| p > 10-6 毫巴 | ms | <100 | <100 |
| p = 10-8 毫巴 | s | ~1 | |
| 量规标识 (FCC connector gauges) | |||
| 3MAx-0xx-000N | kΩ | - | |
| 3MAx-0xx-000Q | kΩ | 100 | |
| 3MBx-0xx-000P | kΩ | - | |
| 状态（针 6） | |||
| Current rating | mA | 100 (sink) | |
| High Voltage is ON | V (dc) | +14.5 ... +30 (depending on supply voltage) | |
| High Voltage is OFF | V (dc) | 0 | |
| Status signal, digital output (D-sub connector) | |||
| Supply voltage | V (dc) | <30 | |
| Current rating | mA | 100 | |
| High voltage ON | V (dc) | 0 | |
| High voltage OFF | open | ||
| 电气连接 | |||
| 3Mxx-0xx-000x | FCC68, 8-pin, female | ||
| 3Mxx-0xx-010x | D-sub, 9-pin, male | ||
| 3Mxx-0xx-04xx | D-Sub HD, 15-pin, male (for RS232/485 version) | ||
| 3Mxx-xxx-x2Gx | D-Sub HD, 15-pin, male (for EtherCAT Version) | ||
| 传感器电缆 | |||
| 3Mxx-0xx-000x | 8-pin, shielded | ||
| 3Mxx-0xx-010x | 9-pin, shielded | ||
| 3Mxx-0xx-04xx | D-Sub HD, 15-pin, male (for RS232/485 version) | ||
| 3Mxx-xxx-x2Gx | D-Sub HD, 15-pin, male (for EtherCAT Version) | ||
| 电缆长度 | |||
| FCC connector cable | m | <50 (0.14 mm2/ conductor) | |
| High voltage (in the measuring chamber) | |||
| Ignition voltage | kV | <4.5 | |
| 工作电压 | kV | <3.3 | <3.3 |
| Current (in the measuring chamber) | |||
| High current | µA | <380 | |
| Low current | µA | <130 | |
| Setpoint relays (MxG55x) | |||
| Range (N2) | mbar bar | 5x10-5 ... 1500 | |
| Relay contact | normally open (NO), potential free | ||
| Hysteresis | % of threshold | 10 | |
| Contact rating of mechanical relays | V/A | <30/ <1 | |
| Switching time | ms | <30 | |
| 曝露在真空的材料 | |||
| 3Mx0-xxx-xxxx | Ni alloy, Mo, AI2O3, glass, stainless steels | ||
| 3Mx3-xxx-xxxx | Mo, AI2O3, stainless steels | ||
| 3Mx0-11x-xxxx | Ni alloy, Mo, Al2O3, glass, Ti, stainless steels | ||
| 3Mx3-11x-xxxx | Mo, Al2O3, Ti, stainless steels | ||
| 内部容量 | |||
| DN 25 ISO-KF | cm³ | ||
| DN 40 ISO-KF | cm³ | ~20.9 | |
| DN 40 CF-F | cm³ | ~25.2 | |
| DN 40 CF-R | cm³ | ~25.6 | |
| 内部容量 | cm³ | 22.8 | 22.8 |
| 重量 (MxG50x) | |||
| DN 25 ISO-KF | g | <280 | <280 |
| DN 40 ISO-KF | g | <320 | |
| DN 40 CF-F & CF-R | g | <570 | <570 |
| Weight (MxG55x) | |||
| DN 25 ISO-KF | g | <280 | <280 |
| DN 40 ISO-KF | g | <320 | |
| DN 40 CF-F & CF-R | g | <570 | <570 |
| 防护等级 | IP 40 | IP 40 | |
| CE conformity | |||
| RoHS | 2011/65/EU | ||
| EMC | 2014/30/EU, EN 61000-6-2, EN 61000-6-3, EN 61326-1 | ||
| Safety | EN 61010-1 | ||
| RS232C / 485C (MxG50x) | |||
| Baud rates | kBaud | 9.6/ 19.2/ 38.4/ 57.6 | |
| Address | 2 switches (address 00 - 255) | ||
| Digital functions | Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behaviour in case of error. | ||
| Connector for RS232 & RS485 | D-Sub HD, 15-pin, male | ||
| EtherCAT® (MxG55x) | |||
| Protocol | EtherCAT®
| ||
| Communication standard | ETG.5003.1 S (R) V1.1.0 4) ETG.5003.2080 S (R) V1.3.0 5) | ||
| Node address | Explicit Device Identification | ||
| Physical layer | 100Base-Tx (IEEE 802.3) | ||
| Digital functions | Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behaviour in case of error. | ||
| EtherCAT connector | 2 x RJ45, 8-pin (socket), Input & output | ||
| EtherCAT cable | Special Ethernet Patch cable or crossover cable, shielded (CAT5e Quality or higher) | ||
| Cable lenght | m (ft.) | <100 (330) | |
1）没有电子元件。
2）电源单元的最小电压必须与传感器电缆的长度成比例地增加。
3）冷阴极点燃。
附件
| MAG5xx | |
|---|---|
| 零件号 | 明细 |
| 211-098 | 细目过滤中心环组件DN 25 ISO-KF |
| 351-550 | MxG50x 点火单元 |
| 211-113 | 中心圈 with baffle DN 25 KF |
| 353-512 | Baffle for BPG400 |
| MPG5xx | |
| 零件号 | 明细 |
| 211-098 | 细目过滤中心环组件DN 25 ISO-KF |
| 351-550 | MxG50x 点火单元 |
| 211-113 | 中心圈 with baffle DN 25 KF |
| 353-512 | Baffle for BPG400 |
备件
| MAG5xx | |
|---|---|
| 零件号 | 明细 |
| 351-500 | MAG500 spare sensor, 25KF, SS |
| 351-556 | Spare ion chamber ti |
| 351-512 | MAG500 spare sensor, 40KF, SS |
| 351-536 | MAG500 spare sensor, 40CF-R, SS |
| 351-524 | MAG500 spare sensor, 40CF-F, SS |
| 351-502 | MAG500 spare sensor, 25KF, TI |
| 351-514 | MAG500 spare sensor, 40KF, TI |
| 351-538 | MAG500 spare sensor, 40CF-R, TI |
| 351-526 | MAG500 spare sensor, 40CF-F, TI |
| 351-501 | MAG504 spare sensor, 25KF, SS |
| 351-513 | MAG504 spare sensor, 40KF, SS |
| 351-537 | MAG504 spare sensor, 40CF-R, SS |
| 351-525 | MAG504 spare sensor, 40CF-F, SS |
| 351-503 | MAG504 Ersatzsensor, 25KF, TI |
| 351-515 | MAG504 spare sensor, 40KF, TI |
| 351-539 | MAG504 spare sensor, 40CF-R, TI |
| 351-527 | MAG504 spare sensor, 40CF-F, TI |
| 351-995 | 起辉器 |
| 351-555 | Spare ion chamber ss |
| MPG5xx | |
| 零件号 | 明细 |
| 351-506 | MPG500 spare sensor, 25KF, SS |
| 351-518 | MPG500 spare sensor, 40KF, SS |
| 351-542 | MPG500 spare sensor, 40CF-R, SS |
| 351-530 | MPG500 spare sensor, 40CF-F, SS |
| 351-508 | MPG500 spare sensor, 25KF, TI |
| 351-520 | MPG500 spare sensor, 40KF, TI |
| 351-544 | MPG500 spare sensor, 40CF-R, TI |
| 351-532 | MPG500 spare sensor, 40CF-F, TI |
| 351-507 | MPG504 spare sensor, 25KF, SS |
| 351-519 | MPG504 spare sensor, 40KF, SS |
| 351-543 | MPG504 spare sensor, 40CF-R, SS |
| 351-531 | MPG504 spare sensor, 40CF-F, SS |
| 351-509 | MPG504 spare sensor, 25KF, TI |
| 351-521 | MPG504 spare sensor, 40KF, TI |
| 351-545 | MPG504 spare sensor, 40CF-R, TI |
| 351-533 | MPG504 spare sensor, 40CF-F, TI |
| 351-995 | 起辉器 |
| 351-555 | Spare ion chamber ss |
| 351-556 | Spare ion chamber ti |
数据表
手册
手册
三维步骤文件
视频
其他文件