| Model | V1500X | | Plasmamethod | RIE•DPmode | | Electrode | Parallelflatstageplate | | Electrodematerial | SUS-304 | | Chambertemperature | Digitaldisplay | | RFgenerator | 100~1500W | | Oscillation | 13.56MHz | | Controlsystem | LCDTouchpanelwith PLC | | Tuningmethod | AutomaticandManual | | Timer | 1sec-9H59min59sec | | Chambersize | (W)600×(D)550×(H)600mm | | Stage size | (W)460×(D)400mm | | Chambermaterial | Aluminum | | Reactiongas | O2,Ar,CF4 | | Purge gas | N2orDryair | | Flow meter | Mass flowcontrol2line | | Vacuumpump | 1,400L/min | | Emergencystopswitch | Pushtypeswitch | | Gas port | 2 pc(1/4"SUSswage- lock) | | Purge port | 1pc(1/4"SUSswage- lock) | | Vacuumport | 1pc(SUSNW40) | | Externaldimension | (W)900×(D)1,000×(H)1,700mm | | Powersupply | AC200/220/380V3phase 25A | | Weight | Approx.300kg | |
