UHF-120高频显微激光测振仪

UHF-120高频显微激光测振仪

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2022-10-21 11:01:33
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宝力达光学科技(东莞)有限公司

宝力达光学科技(东莞)有限公司

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产品简介

UHF-120高频显微激光测振仪 UHF-120 超高频激光测振仪的显著特点是其具有极大的测量带宽,可高分辨率对高达 2.4 GHz 的面外振动进行。UHF-120具有小于1μm的高横向分辨率,这尤其对声表面波 (SAW) 分量的表面波可视化起决定性作用。另一个应用涉及验证体声波 (BAW) 分量和超高频率范围内成像。UHF-120测量结果包含大带宽范围内的振动信息,可一次性快速地识别谐振频率。通过安装在软件控制的高精度xy 工作台的样品移动,完成全场测量。光学振动测量,对样品没有任何附加质量影响高达 2.4 GHz 的超声频振动分析详细显示振型高振幅分辨率适应性激光功率,保护敏感样品和表面高横向分辨率,用于测量短波长兼容普通 MEMS 探针站

详细介绍

Next generation micro- and nanotechnology devices such as micro-acoustic filters, RF-MEMS and ultrasonic transducers involve high frequency mechanical vibration and wave propagation approaching GHz frequencies. For microscopic devices operating at these frequencies only sophisticated optical techniques can provide the spatial resolution, zero mass loading and vibration sensitivity required for proper characterization.  


UHF-120 Ultra High Frequency Vibrometer captures real-time, out-of-plane motions of micro devices with picometer sensitivity and a measurement bandwidth of up to 2.4 GHz. Options provide for either a manual point-by-point system (VibSoft) or an automated scanning system (PSV Soft)  capturing and analyzing deflection shapes.


Technical data


Metrological specifications


Max. vibration frequency

600 MHz

1.2 GHz (optional)

2.4 GHz (optional)


Maximum measurement time

3.906 ms

3.906 ms

1.963 ms


Max. sample rate

40 GSa/s


Amplitude resolution of   UHF-A-120
  data acquisition

8 bit



Displacement-amplitude   resolution 

 1.5 pm at 2.5 kHz resolution bandwidth   (corresponds to 30 fm/√(Hz))


Max. number of FFT lines
  for a vibration spectrum

2,343,750

4,687,500

2,343,750


Best frequency resolution

256 Hz                             

 256 Hz                          

    512 Hz


Number of reference channels  

1




Optical specifications


Laser type                                               

  solid state


Laser wavelength  

 532 nm, visible green beam


Laser spot diameter 

 < 2.5 µm (1/e²) 1


Laser output  

  < 5 mW 2


Laser protection class  

Class 3R


Camera type   

1/4" CCD   color board camera


Active pixels (H x V)

510 x 492


Illumination                                              

integrated,   bright-field


Objective                                                 

 20x microscope objective 3


Field of view                                           

0.71 mm x 0.55   mm (aprox.)


Working distance 

  20 mm





UHF-120 system   configurations



UHF-120
  Ultra High Frequency Vibrometer

UHF-120-SV
  Scanning Ultra High Frequency Vibrometer


Vibrometer system

UHF-I-120 Sensor Head
  UHF-E-120 Controller


Data acquisition &
  Data management system

UHF-A-121 LeCroy   Oscilloscope and Digitizer
  PC-I UHF 19" Industrial PC, 24" (61 cm) TFT monitor, keyboard and   mouse


Software

VibSoft system software

PSV system software


XY-Stage

manual stage (optional)

A-PST-200P XY Precision   Positioning Stage
  A-CTR-110 Axis Controller
  A-JST-0001 Joystick


Accessories

A-CAB-BAS System Cabinet for   19" electronic components
  A-MOB-020X 20x Microscope Objective 3
  UHF-A-SAW SAW Filter test sample
  A-LSG-0532 Laser Safety Goggles
  Hardware manual, software manual and theory manual





UHF-I-120 Sensor Head


Dimensions [W x D x H]                          

158 x 129 x 376 mm


Weight                                                      

11.4 kg


Specification of motion axes


XY-Stage

A-SPK-0002
  Sample Positioning Kit (optional)

A-PST-200P XY
  Precision Positioning Stage


Dimensions [W x D x H]

161 x 158 x 116 mm

310 x 310 x 135 mm


Weight

1.8 kg

21.6 kg


Lateral travel range

13 mm x 13 mm, manually   actuated

200 mm x 200 mm, motorized


Repeatability   (bi-directional)

N/A

+/- 0.5 µm


Tip-Tilt range

+/- 2.5°, manually actuated

+/- 2.5°, manually actuated


Load capacity

0.9 kg

10.0 kg


General specifications


Power                                                  

 100 VAC… 240 VAC ±10%, 50/60 Hz 500 VA   (typical)


Environmental   conditions                       

Operating temperature: +18   °C … +30 °C (64.4 °F … 86 °C);
  Storage temperature: -10 °C … +65 °C (14 °F … 149 °F);
  Relative humidity: max. 80%, non-condensing


Compliance with standards


Electrical safety                                        

Norm1: IEC/EN   61010-1:2011-07

Norm2: IEC/EN   61326-1:2013-07


Emission: FCC Class A,   IEC/EN 61000-3-2 and 61000-3-3


Immunity: IEC/EN 61000-4-2   to 61000-4-6 and IEC/EN 61000-4-11












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